Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-04-28
2009-02-24
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S630000, C356S519000, C356S480000
Reexamination Certificate
active
07495772
ABSTRACT:
A fiber optic sensor includes at least two Fabry-Perot (FP cavities) defined by at least three partially reflecting surfaces which individually and together are capable of generating different interference spectra which are affected by temperature. One of the FP cavities is formed at an end of the sensor and includes a surface which is capable of supporting a thin film, the optical thickness of which is to be measured. The other FP cavity between the lead-in fiber and the first FP cavity thus does not include the film and can thus independently provide highly accurate temperature information for calibrating the optical length of the second FP cavity and compensation for temperature effects on measurement of the thin film supported thereon, preferably by subtraction of a calibrated temperature-dependent change in optical length of the second FP cavity from the measurement made.
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Cooper Kristie L.
Wang Anbo
Zhang Yan
Connolly Patrick J
Virginia Tech Intellectual Properties Inc.
Whitham Curtis Christofferson & Cook PC
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