Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-05-17
2011-05-17
Rosenau, Derek J (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S317000
Reexamination Certificate
active
07944130
ABSTRACT:
Disclosed herein is a multi-cantilever MEMS sensor functioning as a mechanical sensor having a plurality of cantilevers, replacing a conventional DSP based sound source localization algorithm and reducing production cost when the MEMES sensor applied to mass-produced robots, a manufacturing method thereof, a sound source localization apparatus using the multi-cantilever MEMS sensor and a sound source localization method using the sound source localization apparatus. The multi-cantilever MEMS sensor comprises a plurality of cantilevers100each of which includes a piezoresistor20and a sensing part30for sensing a predetermined signal generated according to the piezoresistor20; and a terminal T for detecting the signal generated according to the piezoresistor20, wherein one end of each cantilever is a free end and the other end thereof is a fixed end of each cantilever, the piezoresistor20and the sensing part30are formed at the fixed end, and the free ends of the plurality of cantilevers100have different lengths. A method of manufacturing the multi-cantilever MEMS sensor is provided. Furthermore, a method of using the multi-cantilever MEMS sensor and a sound source localization apparatus are provided.
REFERENCES:
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patent: 6651504 (2003-11-01), Datskos
patent: 2002/0139190 (2002-10-01), Daraktchiev et al.
patent: 2002/0174715 (2002-11-01), Kim et al.
patent: 2009/0052687 (2009-02-01), Schwartz
patent: 2001-133322 (2001-05-01), None
Machine translation of JP 2001-133322 generated from the website of the Japanese Patent Office.
Kim et al., “Sound Source Localization Piezoresistive Multi-Cantilever Microphones”, IEEE Sensors 2007 Conference, 2007, pp. 780-783.
Jo Hyun
Kim Jin-Young
Kim Yong Chul
Lee Seung Seob
Park Youn-sik
Allen Dyer Doppelt Milbrath & Gilchrist, P.A.
Korea Advanced Institute of Science and Technology
Rosenau Derek J
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