Multi-beam probe with adjustable beam angle

Details Multi-beam probe with adjustable beam angle Multi-beam probe with adjustable beam angle

2006-07-11

2006-07-11

Toatley, Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S241100

Reexamination Certificate

active

07075660

ABSTRACT:
Compound surfaces of a test object are interferometrically measured by a multi-beam probe. One of two measuring beams emerges from the probe at a fixed angle for measuring one of the compound surfaces, and the other measuring beam emerges from the probe at a variable angle for measuring a plurality of other compound surfaces.

REFERENCES:
patent: 6462815 (2002-10-01), Drabarek et al.
patent: 6781699 (2004-08-01), Dunn et al.
patent: 2004/0075842 (2004-04-01), Dunn et al.

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