Multi-beam modulator for a particle beam and use of the...

Details Multi-beam modulator for a particle beam and use of the... Multi-beam modulator for a particle beam and use of the...

2005-10-25

2010-06-22

Vanore, David A (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492220, C250S3960ML

Reexamination Certificate

active

07741620

ABSTRACT:
The invention discloses a multibeam modulator which generates a plurality of individual beams from a particle beam. The particle beam illuminates the multibeam modulator at least partially over its surface. The multibeam modulator comprises a plurality of aperture groups composed of aperture row groups. The totality of all aperture rows defines a matrix of m×n cells, where m cells form a row, and k openings are formed in each row. The density of openings within a row is inhomogeneously distributed.

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J. Vac. Sci. Technol. B 15(6), Nov./Dec. 1997, pp. 2382 to 2386 “Programmable Aperture Plate for Maskless High-Throughput Nanolithography” by Berry et al.

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