Multi-beam ion/electron spectra-microscope

Details Multi-beam ion/electron spectra-microscope Multi-beam ion/electron spectra-microscope

2011-05-24

2011-05-24

Vanore, David A (Department: 2881)

Radiant energy

Electron energy analysis

C250S306000, C250S307000, C250S309000, C250S310000, C250S492210, C250S492230, C250S492300, C250S493100

Reexamination Certificate

active

07947951

ABSTRACT:
This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simultaneously capture the spectrum of both secondary electrons and ions. The highly dispersive, high resolution mass spectrometer portion of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low energy secondary electrons through to the elastic backscattered electrons.

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