Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-16
2007-10-16
Lee, Hwa (Andrew) (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S493000
Reexamination Certificate
active
11030755
ABSTRACT:
In general, in one aspect, the invention features an apparatus including a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least three of the measurement axes are in a common plane, wherein the output beams each include a component that makes a pass to the measurement object along a common beam path.
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Fish & Richardson P.C.
Lee Hwa (Andrew)
Zygo Corporation
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