Multi-axis force sensor chip and multi-axis force sensor...

Measuring and testing – Dynamometers – Responsive to multiple loads or load components

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C073S862041, C073S862623

Reexamination Certificate

active

07458281

ABSTRACT:
A multi-axis sensor chip provided by the invention includes a semiconductor substrate having an action part having an external force action area part and non-deforming area parts, a support part supporting the action part, and connecting parts connecting the action part to the support part. The sensor chip also has strain resistance devices provided on deforming parts of the connecting parts and has temperature-compensating resistance devices provided on the non-deforming area parts. Temperature compensation is carried out exactly by means of the temperature-compensating resistance devices when an external force or a load acts on the action part, and highly accurate stress detection can be carried out.

REFERENCES:
patent: 4295117 (1981-10-01), Lake et al.
patent: 4448083 (1984-05-01), Hayashi
patent: 4454771 (1984-06-01), Shimazoe et al.
patent: 4905523 (1990-03-01), Okada
patent: 5095762 (1992-03-01), Holm-Kennedy et al.
patent: 6148671 (2000-11-01), Nakamizo et al.
patent: 2003/0140713 (2003-07-01), Ohsato et al.
patent: 2005/0081645 (2005-04-01), Ohsato et al.
patent: 2006/0174718 (2006-08-01), Morimoto
patent: 2007/0000335 (2007-01-01), Morimoto
patent: 0836151 (1998-04-01), None
patent: 1 327 870 (2003-07-01), None
patent: 63-61609 (1988-11-01), None
patent: 2746298 (1998-02-01), None
patent: 2003-207405 (2003-07-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Multi-axis force sensor chip and multi-axis force sensor... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-axis force sensor chip and multi-axis force sensor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-axis force sensor chip and multi-axis force sensor... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4022339

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.