Multi-axes, sub-micron positioner

Details Multi-axes, sub-micron positioner Multi-axes, sub-micron positioner

2006-07-18

2006-07-18

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S012060, C310S323170, C250S442110

Reexamination Certificate

active

07078848

ABSTRACT:
A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.

REFERENCES:
patent: 3525917 (1970-08-01), Leenhouts
patent: 3684904 (1972-08-01), Galutva et al.
patent: 3904945 (1975-09-01), Hassan et al.
patent: 4516253 (1985-05-01), Novak
patent: 4525852 (1985-06-01), Rosenberg
patent: 4669359 (1987-06-01), Shiba
patent: 4723086 (1988-02-01), Leibovich et al.
patent: 4812725 (1989-03-01), Chitayat
patent: 4843293 (1989-06-01), Futami
patent: 4887804 (1989-12-01), Ohtsuka
patent: 4917462 (1990-04-01), Lewis et al.
patent: 4948330 (1990-08-01), Nomura et al.
patent: 5120034 (1992-06-01), Van Engelen et al.
patent: 5153494 (1992-10-01), Hollis, Jr.
patent: 5160877 (1992-11-01), Fujiwara et al.
patent: 5418771 (1995-05-01), Kasanuki et al.
patent: 5705878 (1998-01-01), Lewis et al.
patent: 5798927 (1998-08-01), Cutler et al.
patent: 5996437 (1999-12-01), Novak et al.
patent: 6130517 (2000-10-01), Yuan et al.
patent: 6229674 (2001-05-01), Todd
patent: 6252333 (2001-06-01), Iino et al.
patent: 6310342 (2001-10-01), Braunstein et al.
patent: 6346710 (2002-02-01), Ue
patent: 6350080 (2002-02-01), Do et al.
patent: 6437463 (2002-08-01), Hazelton et al.
patent: 6509957 (2003-01-01), Tanaka
patent: 6639225 (2003-10-01), Kirschstein et al.
patent: 6753534 (2004-06-01), Novak et al.
patent: 6798088 (2004-09-01), Hsu et al.
patent: 6873404 (2005-03-01), Korenaga
patent: 6917046 (2005-07-01), Korenaga
patent: 6995499 (2006-02-01), Hwang
patent: 2003/0034695 (2003-02-01), Binnard et al.
patent: 58-127325 (1983-07-01), None
patent: 63-244205 (1988-10-01), None
patent: 1-303361 (1989-12-01), None
patent: 2-308546 (1990-12-01), None
patent: 3-110494 (1991-05-01), None
patent: 8-241848 (1996-09-01), None

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