Multi-axes stage

Details Multi-axes stage Multi-axes stage

1994-12-02

1996-12-10

Nguyen, Thong

Optical: systems and elements

Compound lens system

Microscope

359391, 359392, G02B 2126

Patent

active

055836917

ABSTRACT:
A multi-axes stage including a table for mounting an optical component having a plurality of optical paths; and first and second actuators for vertically movably supporting the table, the actuators having a control device for adjusting the vertical movement of the table by each actuator separately, and for controlling the movement of the table in at least one of the rotating direction about the optical paths and the vertical direction.

REFERENCES:
patent: 3010363 (1961-11-01), Malfeld
patent: 4905415 (1990-03-01), Moulin
patent: 4914867 (1990-04-01), Saito et al.
patent: 4948330 (1990-08-01), Nomura et al.
patent: 4953965 (1990-09-01), Iwase et al.
patent: 5038524 (1991-08-01), Moulin
patent: 5165297 (1992-11-01), Krueger
patent: 5228358 (1993-07-01), Sakino et al.
patent: 5323712 (1994-06-01), Kikuiri

Affiliated with

Also associated with

Rating

Multi-axes stage does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-axes stage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-axes stage will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-428431