Multi-actuation MEMS switch

Details Multi-actuation MEMS switch Multi-actuation MEMS switch

2011-07-12

2011-07-12

Takaoka, Dean O (Department: 2817)

Electricity: electrothermally or thermally actuated switches

Electrothermally actuated switches

C337S140000, C337S298000

Reexamination Certificate

active

07978045

ABSTRACT:
A multi-actuation MEMS switch for high frequency signals includes a substrate, a heater disposed on the substrate, a co-planar waveguide disposed on a lowest metal layer, and a movable membrane including at least two metal layers, and an dielectric layer disposed between the co-planar waveguide and the movable membrane. The movable membrane is a fixed-fixed beam structure with a center indentation. When heat is generated and conducted to the movable membrane or electrostatic force is generated between the movable membrane and the co-planar waveguide or both forces are generated, the movable membrane will bend toward the co-planar waveguide. The position of the movable membrane change capacitance on signal line for switching the RF signal.

REFERENCES:
patent: 6486425 (2002-11-01), Seki
patent: 6927352 (2005-08-01), Bouche et al.
patent: 6937040 (2005-08-01), Maeda et al.
patent: 6969630 (2005-11-01), Ozgur
patent: 7146067 (2006-12-01), Despont et al.
patent: 7282393 (2007-10-01), Tarn
patent: 7876120 (2011-01-01), Awaji et al.

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