Moving stage apparatus and system using the same

Details Moving stage apparatus and system using the same Moving stage apparatus and system using the same

1996-01-29

1998-03-10

Ip, Paul

Electricity: motive power systems

Positional servo systems

Plural servomotors

318632, 318628, 318640, 384 12, 384 13, G05B 106, B65G 4900

Patent

active

057265488

ABSTRACT:
A movable stage apparatus and an exposure system including a moving stage apparatus, includes a movable member capable of being driven by a driving mechanism, and first and second sets of fluid bearings. The first set of fluid bearings supports the movable member. The second set of fluid bearings is connected to a plurality of driving elements. The plurality of driving elements are connected to the movable member and are displaceable in a direction in which the movable member is supported by the first set of fluid bearings. The second set of fluid bearings supports the movable member. Also provided is a controller for applying a voltage to the plurality of driving elements so as to compensate for the postutre of the movable member when the posture of the movable member changes in response to being driven by the driving mechanism. The system further includes an exposure apparatus for exposing an object to be exposed which is mounted on the movable member.

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