Moving mechanism and stage system in exposure apparatus

Details Moving mechanism and stage system in exposure apparatus Moving mechanism and stage system in exposure apparatus

2005-08-25

2008-03-18

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C700S228000

Reexamination Certificate

active

07346414

ABSTRACT:
A moving mechanism includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator which is movable along the second guide surface. The first structural member is supported by the second structural member at three positions.

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