Moving mechanism and stage system in exposure apparatus

Details Moving mechanism and stage system in exposure apparatus Moving mechanism and stage system in exposure apparatus

2006-01-24

2006-01-24

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C700S228000

Reexamination Certificate

active

06990386

ABSTRACT:
Disclosed is a moving mechanism which includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator being movable along the second guide surface, wherein the first and second structural members are isolated from each other with respect to vibration, such that displacement of the stator due to a reaction force as the moving member is driven does not have an influence to the moving member guide surface.

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