Moving mask laser imaging

Details Moving mask laser imaging Moving mask laser imaging

1991-01-03

1992-11-03

Albritton, C. L.

Electric heating

Metal heating

By arc

21912182, B23K 2600

Patent

active

051608235

ABSTRACT:
An excimer laser beam is guided through a moving mask and optics configuration, positioned on computer controlled, synchronously moving stages, to ablate a polyimide substrate. The mask and workpiece move synchronously to enable the ablation of object features on large surface areas without requiring the deactivation and realignment of the laser.

REFERENCES:
patent: 4724219 (1988-02-01), Ridinger
patent: 4764485 (1988-08-01), Loughran et al.
patent: 4786358 (1988-11-01), Yamazaki et al.
Jeffery P. Sercel, "Optimized Beam Delivery for Industrial Excimer Lasers," Photonics Spectra, Dec. 1991, pp. 84-90.

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