Moving apparatus, exposure apparatus, and device...

Details Moving apparatus, exposure apparatus, and device... Moving apparatus, exposure apparatus, and device...

2005-11-01

2005-11-01

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C355S053000, C355S072000, C250S491100, C250S492200, C250S492220

Reexamination Certificate

active

06960845

ABSTRACT:
A moving apparatus includes a first actuator having a movable element and a stator, and a second actuator for driving the stator. The second actuator drives the stator in a direction to suppress rotation of the stator which accompanies movement of the movable element.

REFERENCES:
patent: 5335044 (1994-08-01), Shiraishi
patent: 5623853 (1997-04-01), Novak et al.
patent: 6279490 (2001-08-01), Pastor
patent: 6396568 (2002-05-01), Nishi

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