Moving apparatus, exposure apparatus, and device...

Electrical generator or motor structure – Dynamoelectric – Linear

Reexamination Certificate

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Reexamination Certificate

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07319283

ABSTRACT:
A moving apparatus includes a first actuator having a movable element and a stator, and a second actuator for driving the stator. The second actuator drives the stator in a direction to suppress rotation of the stator which accompanies movement of the movable element.

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Japanese Office Action dated Feb. 5, 2007, Issued in corresponding Japanese patent application No. 2002-295014, with English translation.

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