Movement measuring interferometer and driving system

Details Movement measuring interferometer and driving system Movement measuring interferometer and driving system

1990-07-20

1992-11-17

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

051647923

ABSTRACT:
A table carrier system of the present invention has a movable table for carrying an object. A displacement detecting system for detecting the displacement of the table by using an interference of light, and a table driving system positions the table according to the detected displacement. If a scaling amount is set in order to change a predetermined displacement range of the table, a reference value of wavelength set in the detecting system is changed in compliance with the scaling amount.

REFERENCES:
patent: 4643577 (1987-02-01), Roth et al.
patent: 4814625 (1989-03-01), Yabu

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