Movement guiding mechanism

Electrical generator or motor structure – Dynamoelectric – Linear

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Details

310 53, H02K 4100

Patent

active

049163400

ABSTRACT:
Movement guiding device includes two parallel stationary guides provided on a surface plate, a plurality of hydrostatic gas bearing members provided in relation to the surface plate and the stationary guides for supporting a Y stage, a plurality of hydrostatic gas bearing members provided in relation to the surface plate and the Y stage for supporting an X stage, two linear motors provided outside the stationary guides for moving the Y stage in a Y direction, and a linear motor coupled integrally to the Y stage for moving the X stage in an X direction. The Y stage moving linear motor has a stator fixed to the surface plate and a moving element fixed to the Y stage. The X stage driving linear motor has a stator fixed to the Y stage and a moving element fixed to the X stage. Each stator and each moving element are fixed to a corresponding component with a predetermined interspacing thereto defined by spacers of polycarbonate, while each interspacing is filled with a heat insulating material such as expanded polystyrene, for example. With this structure, without interfering with the transmission of the drive force of each linear motor, the transmission of heat generated by the linear motor to the surface plate is effectively prevented. In one embodiment, a cooling medium is supplied to a coil supporting member in accordance with a difference in temperature between the surface plate and the linear motor.

REFERENCES:
patent: 4541747 (1985-09-01), Imaizumi et al.
patent: 4744675 (1988-05-01), Sakino et al.
patent: 4788477 (1988-11-01), Teramachi

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