Moveable object carrier, lithographic apparatus comprising...

Electrical generator or motor structure – Dynamoelectric – Linear

Reexamination Certificate

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Details

C310S053000

Reexamination Certificate

active

07456527

ABSTRACT:
A moveable object carrier is moveable in a first direction and in a second direction to be positioned in a plane. The object carrier may be moved in the first direction by a first and a second linear actuator. The first and second linear actuators are adapted to support the object carrier. Thereto the linear actuators may comprise additional bearing and the linear actuators are positioned relative to the object carrier such that no other bearing is required to prevent the object carrier from falling or tilting.The object carrier may be moved in the second direction by a third and a fourth linear actuator, which linear actuators may be adapted to support the first and the second linear actuators.

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patent: 2002/0018195 (2002-02-01), Iwamoto et al.

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