Moveable micro-electromechanical device

Details Moveable micro-electromechanical device Moveable micro-electromechanical device

2007-11-27

2007-11-27

Mack, Ricky (Department: 2873)

Optical: systems and elements

Light interference

Electrically or mechanically variable

C359S577000, C359S290000, C359S291000

Reexamination Certificate

active

11517721

ABSTRACT:
A MEMS device is provided. The MEMS device may include a first plate and a second plate defining a cavity with the first plate. The MEMS device may also include a first transducer configured to cause a first relative movement between the first and second plates and a second transducer configured to cause a second relative movement between the first and second plates.

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