Movable transfer chamber and substrate-treating apparatus...

Details Movable transfer chamber and substrate-treating apparatus... Movable transfer chamber and substrate-treating apparatus...

2006-08-17

2010-12-07

Keenan, James (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S939000

Reexamination Certificate

active

07845892

ABSTRACT:
A substrate-treating apparatus including: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space for containing a substrate; and a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track, wherein the at least one movable transfer chamber is atmospherically isolated from an exterior while moving.

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