Movable table unit with piezoelectric element and strain gauge

Details Movable table unit with piezoelectric element and strain gauge Movable table unit with piezoelectric element and strain gauge

2009-03-31

2011-11-15

San Martin, Jaydi (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

08058775

ABSTRACT:
A movable table unit provided here has a simple structure but can increase the precision of detecting the displacement of a movable table, and comprises a quadrangle frame-shaped stationary base a movable table disposed inside the stationary base, spring members interposed between the movable table and the stationary base, and a piezoelectric element fixed to either the stationary base or the movable table and capable of expanding/contracting in the axis direction to exert either an expansion or contraction force on the other, to allow the movable table to move relative to the stationary base. A strain gauge is mounted in a strain occurrence site where strain occurs as the movable table moves, so that the amount of travel of the movable table is detected on the basis of the value detected by the strain gauge.

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patent: 2009/0323083 (2009-12-01), Park et al.
patent: 2005236166 (2005-09-01), None

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