Movable stage, XY stage, head carriage and tester of...

Details Movable stage, XY stage, head carriage and tester of... Movable stage, XY stage, head carriage and tester of...

2006-11-14

2006-11-14

LeDynh, Bot (Department: 2862)

Electricity: measuring and testing

Magnetic

Magnetic test structure elements

C324S261000, C324S210000

Reexamination Certificate

active

07135861

ABSTRACT:
Pressing means is provided to press a movable base to a surface of a reference base to make the movable base in contact with the surface of the reference base to thereby lock-down the movable base on the surface of the reference base. The movable base is moved while slightly floating with respect to the reference base. A movable floating mechanism is provided to float the movable base from the reference base against pressing force of the pressing means exerted on the movable base to thereby relieve the locking. A floating amount of the movable base from the reference base may be small enough to reduce or substantially remove sliding friction between the movable base and the reference base. For example, the floating amount may be as small as ten to several hundreds microns.

REFERENCES:
patent: 5726073 (1998-03-01), Zhang et al.
patent: 6140815 (2000-10-01), Greene et al.
patent: 5-126973 (1993-05-01), None
patent: 2002-518777 (2002-06-01), None

Affiliated with

Also associated with

Rating

Movable stage, XY stage, head carriage and tester of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Movable stage, XY stage, head carriage and tester of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Movable stage, XY stage, head carriage and tester of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3635781