Movable stage system, lithographic apparatus, and device...

Details Movable stage system, lithographic apparatus, and device... Movable stage system, lithographic apparatus, and device...

2006-09-19

2006-09-19

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C310S012060

Reexamination Certificate

active

07110086

ABSTRACT:
A movable stage system capable of operating in a lithographic apparatus, is presented. The movable stage system includes a base, a platform that is movable relative to the base, a balance mass that is movable relative to the base and is configured to compensate for forces generated by a movement of the platform, and a drive mechanism configured to move the platform and the balance mass relative to the base. The drive mechanism comprises at least one belt transmission that couples the platform and the balance mass such that when the platform moves along a direction, the balance mass is moved in an at least partially opposite direction, and a driving device configured to mechanically engage the balance mass or the platform to directly drive the platform or the balance mass.

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Uchida et al., “A Vertical X-Y Stage for X-Ray Lithography Using SOR,”Bulletin of the Japan Society of Precision Engineering, vol. 22, No. 2, Jun. 1998, pp. 102-108, XP-000892597.

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