Movable stage mechanism and exposure apparatus using the same

Details Movable stage mechanism and exposure apparatus using the same Movable stage mechanism and exposure apparatus using the same

1994-07-29

1996-07-16

Braun, Fred L.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742, H01L 2102

Patent

active

055371868

ABSTRACT:
A movable stage apparatus suitable for a semiconductor exposure apparatus or the like has a stage, a first driving mechanism for moving the stage in a predetermined direction, and a second driving mechanism for moving the stage by a minute amount in the predetermined direction. One of the mover and stator of the second driving mechanism is substantially fixed to the stage and the other is substantially movable with the movement of the stage by the first driving mechanism.

REFERENCES:
patent: 4769680 (1988-09-01), Resor, III et al.
patent: 5073912 (1991-12-01), Kobayashi et al.

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