Movable stage apparatus

Details Movable stage apparatus Movable stage apparatus

2011-08-30

2011-08-30

Glick, Edward J. (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for original

Reexamination Certificate

active

08009275

ABSTRACT:
An exposure apparatus that includes a movable stage apparatus. The movable stage apparatus includes a master stage on which a reflecting master is to be mounted, in which, when a space is divided by a plane including a reflection surface of the master, a guide surface to guide movement of the master stage is arranged in a space opposite to a space where an exposure light beam to be reflected by the master passes.

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