Movable sensor device

Details Movable sensor device Movable sensor device

2008-03-04

2008-03-04

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C257S415000, C257S417000

Reexamination Certificate

active

07337666

ABSTRACT:
A movable sensor device includes a laminate body in which a micromechanical acting layer having a movable sensor structure and a coating layer coated on the micromechanical acting layer is successively laminated on a substrate. A draft portion penetrates through the laminate body in the lamination direction. The draft portion and a residual portion thereof are disposed at a peripheral portion of the movable sensor structure in the laminate body. The residual portion is a thin portion that is smaller in thickness than the laminate body and has a spring function.

REFERENCES:
patent: 6067858 (2000-05-01), Clark et al.
patent: 6357299 (2002-03-01), Aigner et al.
patent: 6465854 (2002-10-01), Muenzel et al.
patent: 6472244 (2002-10-01), Ferrari et al.
patent: 6593663 (2003-07-01), Ikezawa et al.
patent: 2003/0049878 (2003-03-01), Offenberg et al.
patent: A-2000-55667 (2003-09-01), None
Wolf et al., Silicon Processing for the VLSI Era vol. 1: Processing Technology, Lattice Press, Sunset Beach, CA, USA, pp. 151-156, 1986.

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