Ventilation – Workstation ventilator – Covered workbench chamber
Reexamination Certificate
1999-05-17
2001-07-17
Joyce, Harold (Department: 3749)
Ventilation
Workstation ventilator
Covered workbench chamber
C312S293100, C454S049000, C454S187000
Reexamination Certificate
active
06261171
ABSTRACT:
CROSS-REFERENCE TO RELATED APPLICATION
This application claims the priority benefit of Taiwan application serial no. 88106000 filed Apr. 15, 1999, the full disclosure of which is incorporated herein by reference.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a maintenance apparatus. More particularly, the present invention relates to a movable multi-function maintenance apparatus, which prevents air pollution and protects the safety of workers.
2. Description of the Related Art
In order to meet different fabrication requirements, gases which may comprise toxic gases or flammable gases, are increasingly required in semiconductor industry. These toxic or flammable gases cause a safety problem of worker. In a semiconductor factory, a clean and dustless environment, which is usually semi-isolated, is required. However, since most of the maintenance apparatuses to achieve the above environment are not properly isolated, there is an elevated risk for workers while disassembling machines for maintenance. The pollution problem becomes particularly serious when as leakage occurs, and such pollution may damage the health of workers instantly or gradually.
SUMMARY OF THE INVENTION
The invention provides a movable multi-function maintenance apparatus. A support apparatus connected to a base. A first airtight chamber is supported by the support apparatus on the base. The first airtight chamber comprises a ceiling, a floor, and a sidewall. Central portions of the ceiling and the floor are slightly raised above the edge portions of the ceiling and the floor. A first vacuum ventilator is formed in the floor. The first vacuum ventilator can be open or closed. An electric door mounted on the sidewall in order to deliver in and out the mechanical members. A detachable transparent outer covers the ceiling of the first airtight chamber to form a second airtight chamber. A second vacuum ventilator formed in the transparent outer cover. A manipulation apparatus is mounted in the transparent outer cover. A toxic-gas detector is mounted on the transparent outer cover. An exhaust apparatus is placed in the base and connected to the first and the second vacuum ventilators. A rolling structure is mounted under the base to facilitate movement of the multi-function maintenance apparatus.
The present invention provide a movable multi-function maintenance apparatus to enable workers work in a safe environment, as well as to prevent from polluting the environment. In addition, the movable multi-function maintenance apparatus of the invention is easy for workers to operate due to the mobility thereof.
It is to be understood that both the foregoing general description and the following detailed description are exemplary, and are intended to provide further explanation of the invention as claimed.
REFERENCES:
patent: 4111753 (1978-09-01), Folsom et al.
patent: 5257957 (1993-11-01), Diccianni et al.
patent: 5262578 (1993-11-01), Hall
patent: 5316541 (1994-05-01), Fischer
patent: 5685771 (1997-11-01), Kleppen
Boles Derek S.
Huang Jiawei
J.C. Patents
Joyce Harold
Taiwan Semiconductor Manufacturing Co. Ltd.
LandOfFree
Movable multi-function maintenance apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Movable multi-function maintenance apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Movable multi-function maintenance apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2509036