Movable micro-device

Details Movable micro-device Movable micro-device

2008-02-26

2011-10-04

Thomas, Eric (Department: 2835)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S292000, C361S280000

Reexamination Certificate

active

08031459

ABSTRACT:
A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.

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