Movable micro-body

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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Details

C347S260000

Reexamination Certificate

active

07038826

ABSTRACT:
A movable micro-body can reduce deflections and show a large permissible angle of twist. The movable micro-body includes a movable plate and one or two torsion bars, the movable plate being supported by a support member with interposition of at least one link member arranged in a direction intersecting the torsion bars.

REFERENCES:
patent: 3532408 (1970-10-01), Dostal
patent: 4317611 (1982-03-01), Petersen
patent: 6172797 (2001-01-01), Huibers
patent: 6-82711 (1994-03-01), None

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