Movable light source type exposure apparatus

Details Movable light source type exposure apparatus Movable light source type exposure apparatus

1986-07-11

1987-07-21

Hart, Douglas

Illumination

Light source and modifier

Including reflector

355 53, 355 67, 355 71, 355 80, 362303, 362319, F21V 700, G03B 2754

Patent

active

046822771

ABSTRACT:
A movable light-source type exposure apparatus comprising a light source disposed at the focal point of a parabolic reflector, a first light-shielding member disposed right beneath the light source and intended to prevent the light rays from the light source from being irradiated directly over a mask and a work, a second light-shielding member disposed closely to the mask and work so as to cause the formation of a shadow capable of equalizing the cumulated amounts of light rays at points thereon, a positioning/fixing means intended, for each exposure, to position and fix a retaining frame for the mask and a retaining frame for the work, and a light-source moving means for moving a lamp house having the parabolic reflector, light source, first light-shielding member and second shielding member over the mask and work for purpose of causing the same to be exposed.

REFERENCES:
patent: 3042795 (1962-07-01), Kron
patent: 4172658 (1979-10-01), Tani
patent: 4215935 (1980-08-01), Loeback
patent: 4277166 (1981-07-01), van Boven
patent: 4348105 (1982-09-01), Caprari
patent: 4378583 (1983-03-01), Caprari

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