Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Patent
1988-12-05
1994-10-11
Joyce, Harold
Heating
Processes of heating or heater operation
Including preparing or arranging work for heating
432 11, 432152, 432253, F27D 306, F27B 926
Patent
active
053541987
ABSTRACT:
A movable cantilevered purge system providing for a wafer load position, a wafer purge position, and a wafer process position. The movable cantilevered purge system includes an elephant carrier vehicle for movement of a movable quartz elephant tube. The movable quartz elephant tube includes a purge injector and a return exhaust tube. A cantilevered paddle clamping vehicle moves behind the movable quartz elephant carrier vehicle and holds a silicon carbide or ceramic paddle. The elephant carrier vehicle includes a quartz sealing ring and a stainless steel sealing ring carried on pivotable adjusting blocks, and are supported by a plurality of cylindrical tubes. The quartz sealing ring concentrically positions about the process tube of the furnace and a metal ring positions about a scavenger face. The return exhaust tube connects back into the scavenger area of the furnace.
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Cyrco Twenty-Two, Inc.
Jaeger Hugh D.
Joyce Harold
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