Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2011-08-16
2011-08-16
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000, C356S401000, C356S493000, C356S494000, C356S614000
Reexamination Certificate
active
07999918
ABSTRACT:
A laser beam emitted by an encoder main body enters a wafer table via a PBS from the outside, and reaches a grating at a point that is located right under exposure area, and is diffracted by the grating. Then, by receiving interference light of a first polarized component that has returned from the grating and a second polarized component reflected by the PBS, positional information of the wafer table is measured. Accordingly, because the first polarized component, which has passed through PBS passes through the wafer table until it is synthesized with the second polarized component again, does not proceed through the atmosphere outside, position measurement of the wafer table can be performed with high precision without the measurement beam being affected by the fluctuation of the atmosphere around the wafer table.
REFERENCES:
patent: 4775877 (1988-10-01), Kosugi et al.
patent: 4780617 (1988-10-01), Umatate et al.
patent: 5021649 (1991-06-01), Nishimura et al.
patent: 5309198 (1994-05-01), Nakagawa
patent: 5579111 (1996-11-01), Maeda
patent: 5610715 (1997-03-01), Yoshii et al.
patent: 5666196 (1997-09-01), Ishii et al.
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6032997 (2000-03-01), Elliott et al.
patent: 6208407 (2001-03-01), Loopstra
patent: 6590634 (2003-07-01), Nishi et al.
patent: 6611316 (2003-08-01), Sewell
patent: 6778257 (2004-08-01), Bleeker et al.
patent: 6819425 (2004-11-01), Kwan
patent: 6897963 (2005-05-01), Taniguchi et al.
patent: 7023610 (2006-04-01), Ohtsuki et al.
patent: 7025498 (2006-04-01), del Puerto
patent: 7102729 (2006-09-01), Renkens et al.
patent: 7161659 (2007-01-01), Van Den Brink et al.
patent: 7238931 (2007-07-01), Nabeshima et al.
patent: 7253875 (2007-08-01), Luttikhuis et al.
patent: 7256871 (2007-08-01), Loopstra et al.
patent: 7289212 (2007-10-01), Kwan
patent: 7292312 (2007-11-01), Loopstra et al.
patent: 7333174 (2008-02-01), Koenen et al.
patent: 7348574 (2008-03-01), Pril et al.
patent: 7349069 (2008-03-01), Beems et al.
patent: 7362446 (2008-04-01), Van Der Pasch et al.
patent: 7405811 (2008-07-01), Beems et al.
patent: 7486385 (2009-02-01), Ebihara
patent: 2002/0041380 (2002-04-01), Kwan
patent: 2002/0176096 (2002-11-01), Sentoku et al.
patent: 2002/0196421 (2002-12-01), Tanaka et al.
patent: 2005/0128461 (2005-06-01), Beems et al.
patent: 2005/0259234 (2005-11-01), Hirukawa et al.
patent: 2006/0023178 (2006-02-01), Loopstra et al.
patent: 2006/0023194 (2006-02-01), Loopstra et al.
patent: 2006/0139595 (2006-06-01), Koenen et al.
patent: 2006/0139660 (2006-06-01), Kwan
patent: 2006/0170892 (2006-08-01), Koenen et al.
patent: 2006/0227309 (2006-10-01), Loopstra et al.
patent: 2006/0238731 (2006-10-01), Beems et al.
patent: 2006/0238733 (2006-10-01), Beems et al.
patent: 2007/0035267 (2007-02-01), Gao et al.
patent: 2007/0052976 (2007-03-01), Pril et al.
patent: 2007/0076218 (2007-04-01), Van Empel et al.
patent: 2007/0153253 (2007-07-01), Van Buel et al.
patent: 2007/0195296 (2007-08-01), Van Der Pasch et al.
patent: 2007/0223007 (2007-09-01), Klaver et al.
patent: 2007/0263191 (2007-11-01), Shibazaki
patent: 2007/0263197 (2007-11-01), Luttikhuis et al.
patent: 2007/0288121 (2007-12-01), Shibazaki
patent: 2008/0043212 (2008-02-01), Shibazaki
patent: 2008/0088843 (2008-04-01), Shibazaki
patent: 1 630 585 (2006-03-01), None
patent: A-63-231217 (1988-09-01), None
patent: A-1-272917 (1989-10-01), None
patent: A-3-18720 (1991-01-01), None
patent: A-4-265805 (1992-09-01), None
patent: A-10-38517 (1998-02-01), None
patent: A-2002-151405 (2002-05-01), None
patent: A-2003-149005 (2003-05-01), None
patent: A-2003-166856 (2003-06-01), None
patent: A-2004-101362 (2004-04-01), None
patent: A-2006-292728 (2006-10-01), None
patent: A-2007-093546 (2007-04-01), None
patent: WO 01/35168 (2001-05-01), None
patent: WO 2004/053955 (2004-06-01), None
patent: WO 2004/107011 (2004-12-01), None
patent: WO 2006/038952 (2006-04-01), None
Written Opinion (PCT/ISA/237) cited in International Searching Authority issued for PCT Application No. PCT/JP2007/068933 dated Dec. 18, 2007.
Translation of JP-A-03-018720, dated Jan. 28, 1991.
Translation of JP-A-2002-15I405, dated May 24, 2002.
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
Whitesell-Gordon Steven H
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