Movable body position control device and stage device using...

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means

Reexamination Certificate

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Details

C318S623000, C318S632000

Reexamination Certificate

active

07372231

ABSTRACT:
A movable body position control device includes a pair of position detectors configured to detect moving positions of both ends of a movable body; a pair of driving parts, the driving parts being configured to drive the both ends of the movable body based on a detection signal from the pair of the position detectors; a translation control part configured to make the driving parts can generate a driving force whereby a difference of translational action of the movable body can be prevented in a case where a moving speed of the movable body is changed due to a disturbance, and configured to control the driving parts so that detected positions of the position detectors can be consistent with each other; and a rotation control part configured to make the driving parts can generate the driving force whereby a rotational action of the movable body can be prevented in a case where the moving speed of the movable body is changed due to the disturbance and the movable body is displaced in a rotational direction, and configured to control the driving parts so that the moving body does not lean against a moving direction.

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