Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2008-08-22
2011-12-27
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S075000
Reexamination Certificate
active
08085385
ABSTRACT:
A first positional information of a wafer stage is measured using an interferometer system such as, for example, a Z interferometer. At the same time, a second positional information of the wafer stage is measured using a surface position measurement system such as, for example, two Z heads. Moving average is applied to a difference between the first positional information and the second positional information for a predetermined measurement time to set a coordinate offset, and the coordinate offset is used to inspect the reliability of output signals of the surface position measurement system. When the output signals are confirmed to be normal, servo control of the wafer stage is performed using a sum of the first positional information and the coordinate offset. According to the servo control by this hybrid method, drive control of the wafer stage which has the stability of the interferometer and the precision of the Z heads becomes possible.
REFERENCES:
patent: 5003342 (1991-03-01), Nishi
patent: 5424552 (1995-06-01), Tsuji et al.
patent: 6819433 (2004-11-01), Takai et al.
patent: 6859260 (2005-02-01), Nelson et al.
patent: 6897963 (2005-05-01), Taniguchi et al.
patent: 7528965 (2009-05-01), Loopstra et al.
patent: 2004/0179180 (2004-09-01), Miura
patent: 2005/0128456 (2005-06-01), Nelson et al.
patent: 2006/0187436 (2006-08-01), Nelson et al.
patent: 2006/0238731 (2006-10-01), Beems et al.
patent: 2007/0051160 (2007-03-01), Pril et al.
patent: 2007/0195296 (2007-08-01), Van Der Pasch et al.
patent: 2007/0263191 (2007-11-01), Shibazaki
patent: 2008/0043212 (2008-02-01), Shibazaki
patent: 2008/0088843 (2008-04-01), Shibazaki
patent: 0 984 329 (2000-03-01), None
patent: 1 582 933 (2005-10-01), None
patent: A-61-196532 (1986-08-01), None
patent: A-05-160003 (1993-06-01), None
patent: A-5-160003 (1993-06-01), None
patent: A-6-241720 (1994-09-01), None
patent: A-2003-031493 (2003-01-01), None
patent: A-2003-31493 (2003-01-01), None
Dec. 2, 2008 Written Opinion issued in Application No. PCT/JP2008/002265 (with English translation).
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
Movable body drive method and movable body drive system, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Movable body drive method and movable body drive system, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Movable body drive method and movable body drive system, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4295038