Movable aperture photoelectric measuring instrument

Details Movable aperture photoelectric measuring instrument Movable aperture photoelectric measuring instrument

1983-05-02

1985-10-29

Rosenberger, R. A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356373, 356375, 250237G, G01B 1100, G01B 1126

Patent

active

045498083

ABSTRACT:
A photoelectric measuring instrument for determining position deviations of an object is provided with an illuminated aperture and an objective which cooperate to generate an image of the illuminated aperture on the object to be measured. The image of the illuminated aperture on the object is reflected by the object and in turn imaged onto the illuminated aperture. This aperture is firmly connected with a measuring graduation which is scanned by a scanning unit to measure the position of the aperture. In the preferred embodiments, both the aperture and the graduation are formed by photolithographic techniques on a photoimpermeable layer which is carried by a transparent plate.

REFERENCES:
patent: 4045141 (1977-08-01), Moriyama et al.
patent: 4070117 (1978-01-01), Johannsmeier et al.

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