Mounting structure of angular rate sensor

Details Mounting structure of angular rate sensor Mounting structure of angular rate sensor

2007-10-16

2009-06-16

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Structural installation or mounting means

C073S504120, C073S504140

Reexamination Certificate

active

07546768

ABSTRACT:
An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.

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