Mounting member for polishing

Details Mounting member for polishing Mounting member for polishing

1997-03-20

1999-02-16

Rose, Robert A.

Abrading

Machine

Rotary tool

451286, 451287, 451288, 451289, 451 41, 451921, B24B 500

Patent

active

058713930

ABSTRACT:
When a mounting member employed for fine polishing of semiconductor substrates or glass substrates etc. is constituted of a combination of a sheet of continuous porous structure and a template, operating efficiency is lowered by the need to change the template; this is a factor raising production costs, and edge portions of the polishing workpiece get damaged by contact with the template, causing production of defective articles. By making the mounting member for polishing a member in which water repellence was conferred on at least a surface skin layer of a continuous sheet of porous structure, fine polishing without a template was made possible.

REFERENCES:
patent: 4954141 (1990-09-01), Takiyama et al.
patent: 5533923 (1996-07-01), Shamouilian et al.
patent: 5605760 (1997-02-01), Roberts
patent: 5618227 (1997-04-01), Tsutsumi et al.
patent: 5649855 (1997-07-01), Chikaki
patent: 5681212 (1997-10-01), Hayakawa et al.

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