Mounting for carrier bodies in an apparatus for the deposition o

Details Mounting for carrier bodies in an apparatus for the deposition o Mounting for carrier bodies in an apparatus for the deposition o

1995-06-14

1997-01-14

Niebling, John

Metal working

Barrier layer or semiconductor device making

437925, 118729, H01L 2168

Patent

active

055934650

ABSTRACT:
Mounting for carrier bodies in an apparatus for the deposition of semiconductor material on heated carrier bodies, having a fixed current leadthrough passed through the base plate of the deposition apparatus, an electrode holder, and a graphite electrode. There is also at least one spring element which is disposed between the current leadthrough and the electrode holder, which permits a movement of the electrode holder relative to the current leadthrough and which cushions this movement.

REFERENCES:
patent: 4141764 (1979-02-01), Authier et al.
patent: 4160797 (1979-07-01), Goppinger et al.
patent: 4173944 (1979-11-01), K oppl et al.
patent: 4311545 (1982-01-01), Bugl et al.

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