Mounting for arms of a thin-film apparatus

Details Mounting for arms of a thin-film apparatus Mounting for arms of a thin-film apparatus

1977-03-30

1978-04-25

Reynolds, Wm. Carter

Coating apparatus

Work holders, or handling devices

B05C 1300

Patent

active

040856992

ABSTRACT:
A thin-film deposition apparatus includes a rotatable assembly, and a plurality of arms of generally T-shaped configuration, each having a rack rotatably mounted thereto. The arms are mountable to the rotatable assembly by seating of the oppositely extending limbs of each T-shaped arm into generally U-shaped depressions defined by the rotatable assembly.

REFERENCES:
patent: 3486237 (1969-12-01), Sawicki
patent: 3598083 (1971-08-01), Dort et al.
patent: 3643625 (1972-02-01), Mahl
patent: 3983838 (1976-10-01), Christensen

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