Work holders – Holder mounted for movement – Relative to a station
Reexamination Certificate
2011-06-21
2011-06-21
Wilson, Lee D (Department: 3723)
Work holders
Holder mounted for movement
Relative to a station
C269S900000
Reexamination Certificate
active
07963513
ABSTRACT:
A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.
REFERENCES:
patent: 2517431 (1950-08-01), Hildebrand et al.
patent: 6367788 (2002-04-01), Babchuk
patent: 7057365 (2006-06-01), Kishida
patent: 7364124 (2008-04-01), Yuasa et al.
patent: 1737591 (2006-02-01), None
patent: 2808723 (2006-08-01), None
Shimoyama Hiroshi
Suzuki Masaru
Yano Kazuya
Daniel Jamal
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
Wilson Lee D
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