Metal fusion bonding – Process – With condition responsive – program – or timing control
Patent
1993-11-30
1995-09-05
Ramsey, Kenneth J.
Metal fusion bonding
Process
With condition responsive, program, or timing control
228 62, 228 8, 2282331, H01L 2160
Patent
active
054472660
ABSTRACT:
A collet for holding a die with a vacuum force is provided with a linear motor. At the time of bonding the die to a lead frame, a control unit controls the linear motor to mount the die, held by the collet, onto the mounting portion of the lead frame. At this time, the control unit gradually increases the torque of the linear motor to gradually press the die. This reduces the impact load applied to the die, preventing the die from being cracked.
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patent: 4789095 (1988-12-01), Kobayashi
patent: 5060841 (1991-10-01), Oshima et al.
patent: 5207370 (1993-05-01), Mochida et al.
patent: 5285946 (1994-02-01), Tomigashi et al.
patent: 5351872 (1994-10-01), Kobayashi
Kobayashi et al Patent Abstracts of Japan 62-271537 May 1, 1989.
Kabushiki Kaisha Toshiba
Ramsey Kenneth J.
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