Motion control stages and methods of making the same

Details Motion control stages and methods of making the same Motion control stages and methods of making the same

2007-09-04

2007-09-04

Leung, Quyen P (Department: 2874)

Optical waveguides

With optical coupler

With alignment device

C385S147000, C359S871000

Reexamination Certificate

active

11041122

ABSTRACT:
A motion control stage assembly includes a payload assembly and a base assembly joined together with connecting elements. The connecting elements provide degenerate support between the base and the payload such that a desired trajectory of the payload with respect to the base is relatively unconstrained. The connecting element assemblies are substantially planar, and each includes a first connecting element with a first intermediate point, a second connecting element with a second intermediate point, and a secondary connecting element that joins the first and second connecting elements at the first and second intermediate points. The first and the second connecting elements may be formed integrally with each other, of materials including a semiconductor material, a resilient metal or a plastic, and by processes including micromachining, wire-electrical-discharge machining, or injection molding.

REFERENCES:
patent: 5461515 (1995-10-01), Sorce
patent: 6071143 (2000-06-01), Barthel et al.
patent: 6914635 (2005-07-01), Ostergard
Akihiro Koga et al.; “Electrostatic Linear Microactuator Mechanism for Focusing a CCD Camera”; Journal of Lightwave Technology, vol. 17, No. 1: p. 43-47; Jan. 1999.

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