Motion control apparatus for precise repeatable positioning

Work holders – Relatively movable jaws – Jaw features

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Details

269 22, G02B 2126, B23Q 308

Patent

active

046732616

ABSTRACT:
A chuck assembly is adapted to be mounted on the positioning assembly of a microscopic test device for effecting precise repeatable vertical movement of the object under test with negligible incidental movement of any other type. A triangular member fixed with respect to the positioning assembly is received in a circular recess in the upper surface of a housing. An annular projection on the bottom of the triangular member is disposed in an annular cavity in the housing, with a sealing gasket therebetween. The bottom of the cavity is coupled to an associated source of compressed air. A thin flat flexible metal disc overlies the triangular member and is fixed thereto centrally thereof, the periphery of the disc being fixedly clamped between the housing and a retaining ring. A top plate is secured to the housing. The housing, retaining ring and top plate form a unit which is vertically movable with respect to the fixed triangular member, being biased upwardly by compression springs between the housing and retaining ring and being driven downwardly by introduction of compressed air to the groove. The flexible disc limits any incidental non-vertical movement to less than 1 micron.

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Pasello, R., "Micro Displacement System for Automatic Searching of Microscope Focal Plane", IBM Tech. Disc. Bull. 1-1985, pp. 4980-4981.

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