Mosaic polishing pads and methods relating thereto

Details Mosaic polishing pads and methods relating thereto Mosaic polishing pads and methods relating thereto

1998-05-08

2000-02-01

Eley, Timothy V.

Abrading

Abrading process

Utilizing fluent abradant

451550, 451528, 451548, B24B 100

Patent

active

060196661

ABSTRACT:
This invention provides polishing pad tiles which, by virtue of their geometry and surface features, can be arranged to form mosaic pads having channels at the seams which facilitate the flow of polishing fluid during polishing of a workpiece.

REFERENCES:
patent: 4918872 (1990-04-01), Sato et al.
patent: 4927432 (1990-05-01), Budinger et al.
patent: 5060424 (1991-10-01), Sato et al.
patent: 5076024 (1991-12-01), Akagawa et al.
patent: 5209760 (1993-05-01), Wiand
patent: 5212910 (1993-05-01), Breivogel et al.
patent: 5243790 (1993-09-01), Gagne
patent: 5470273 (1995-11-01), Mertens
patent: 5489233 (1996-02-01), Cook et al.
patent: 5578362 (1996-11-01), Reinhardt et al.
patent: 5672095 (1997-09-01), Morimoto et al.

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