Mosaic pattern of infrared detectors of different cut off wave l

Details Mosaic pattern of infrared detectors of different cut off wave l Mosaic pattern of infrared detectors of different cut off wave l

1984-09-28

1986-10-28

Davie, James W.

357 32, 357 61, H01L 2714

Patent

active

046202099

ABSTRACT:
The disclosure relates to an infrared detector and method of making an infrared detector having HgCdTe detectors in the same focal plane of different compositions responsive to two or more different infrared frequency windows. This is accomplished by using SiO.sub.2 and/or Si.sub.x O.sub.y N.sub.z for masking and/or isolation during liquid phase epitaxial growth of the HgCdTe. The SiO.sub.2 and/or Si.sub.x O.sub.y N.sub.z are formed by plasma deposition.

REFERENCES:
patent: 4439912 (1984-04-01), Pollard et al.

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