Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1985-10-15
1986-11-04
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 94, B05D 512, G03C 726
Patent
active
046209867
ABSTRACT:
A process for the reduction of defect formation in conductive layers of semiconductor bodies during patterning, alloying and passivation. A film of low temperature spin-on-glass containing dye is formed on the conductive layer prior to patterning and any high temperature process greater than 200 degrees C. Hermetic passivation is achieved by depositing on the conductive layer a composite film consisting of a lower, tensile layer and an upper, compressive layer with the net force of the passivation film being tensile.
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Chin David D.
Gasser, Jr. Robert A.
Week, Jr. Kenneth R.
Yau Leopoldo D.
Yu Jick M.
Intel Corporation
Newsome John H.
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