MOS FET having a thin film SOI structure

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...

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Details

257 62, 257213, 257 57, H01L 2904, H01L 2976

Patent

active

053089995

ABSTRACT:
The breakdown voltage of an MIS field effect transistor having an SOI structure is improved by forming a gate electrode on the top surface and two side surfaces of a channel region of the SOI layer and by partially extending the gate electrode toward the inside under the bottom of the channel region such the gate electrode is not completly connected.

REFERENCES:
patent: 4996574 (1991-02-01), Shirasaki
patent: 5120666 (1992-06-01), Gotou

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