Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1987-10-14
1991-09-10
Shaver, Paul F.
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
556 20, 556 30, 556174, C07F 500, C07F 950, C07F 970, C07F 990
Patent
active
050475657
ABSTRACT:
The present invention involves chemical compounds particularly useful for the preparation of thin films or layers of group 3/group 5 materials by MOCVD and other techniques. Such compounds may be represented as having the formulas [M(ER'R").sub.3 ].sub.n or [RM(ER'R").sub.2 ].sub.n or [R.sub.2 M(ER'R")].sub.n wherein M is aluminum, gallium or indium; E is phosphorus, arsenic or antimony; R, R', and R" are one or more of hydrogen, alkyl, aryl, alkyl-substituted aryl, cyclic alkyl, halide or other anionic group; and n is between about 1 and about 6.
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Cowley Alan H.
Ekerdt John G.
Jones Richard A.
Board of Regents , The University of Texas System
Shaver Paul F.
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