Monolitic band-pass filter using piezoelectric cantilevers

Details Monolitic band-pass filter using piezoelectric cantilevers Monolitic band-pass filter using piezoelectric cantilevers

1984-02-21

1985-05-14

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310321, 310365, 310311, 333186, H01L 4108

Patent

active

045174865

ABSTRACT:
The device is made by growing thin-film layers of materials on a silicon strate. These layers are then removed selectively by photolitographic masking and etching, to produce a pattern which is a series of cantilever plates which are piezoelectrically coupled. An electrical signal connected to a first pattern of piezoelectric material will cause the associated plate to deflect. A second piezoelectric pattern on each plate will generate an electrical signal due to the strain caused by deflection of the plate, and this signal is transferred to a first piezoelectric pattern on the next plate, and so on down to the last plate where the signal is extracted.

REFERENCES:
patent: 3354413 (1967-11-01), Ko
patent: 3488530 (1970-01-01), Staudte
patent: 3509387 (1970-04-01), Thorn et al.
patent: 3566166 (1971-02-01), Borner
patent: 3590287 (1971-06-01), Berlincourt et al.
patent: 3634787 (1972-01-01), Newell
patent: 3686593 (1972-08-01), Zakaria
patent: 3896401 (1975-07-01), Yano et al.

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